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Introduction
Dry etcher is widely applied in the array process of TFT LCD and LTPS.

Specification
  • It is currently in mass production in Taiwan.- G3.5 / G4 / G4.5 / G5 / G5.5 / G6 / G7.5 / G8.6 Dry Etcher.
  • The sale of all YAC dry etcher’s parts.
  • Repair service for RF Generator, Matching Box, Chiller, Gate Valve, Vacuum Robot. 
  • On-site service for YAC dry etcher.
  • The modification of YAC dry etcher’s software & hardware.