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Introduction
 RTA is a heat treatment equipment which is key-equipment in the advanced LTPS process.

Specification
  • It’s currently applied in Taiwan. – YHR Series RTA.
  • It’s applied on Amorphous silicon film and μ-C film (SPC).
  • Rapid lamping rate: Up 4/sec.
  • The Sale of YAC RTA’s parts.
  • On-Site Service for YAC RTA.
  • The modification of YAC RTA’s software and hardware.