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YAC
Dry etcher is widely applied in the array process of TFT LCD and LTPS.
AMAYA
Atmospheric Pressure Chemical Vapor Deposition System is widely applied to semiconductor and solar cells.
YAC-Anneal
 RTA is a heat treatment equipment which is key-equipment in the advanced LTPS process.
YAC-Solar Texture Tool
YAC Solar Texture Tool is widely applied to Solar Cell for the texture on surface of wafer processing.


MHI
MHI Robot is currently applied in TFT LCD equipment.
MIURA
MIURA’s CHILLER is temperature control equipment for semiconductor and FPD manufacturing equipment.
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