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YAC設備相關零件中古及新品販售

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ITEM 品 名 規 格 適用機台
1 TURBO PUMP TG-2300MBW-80 YAC Dry Etcher
2 TURBO PUMP CONTROLLER TD2300 TG-2300 TURBO PUMP
3 RF GENERATOR RFK75Z-RF / RFK75Z-DC YAC Dry Etcher
4 RF GENERATOR CFK50Z-RF / CFK50Z-DC YAC Dry Etcher
5 MATCH BOX MBK75-PS2 YAC Dry Etcher
6 MATCH BOX CMK50-PS3 YAC Dry Etcher
7 MATCH CONTROLLER MAK5A-PS5 MBK75-PS2
8 MATCH CONTROLLER MAK5A-PS4 CMK50-PS3
9 PC GATE VALVE (VTEX) IRF-01058-2-01 YAC Dry Etcher
10 HE BOX UNIT SA1-05696 YAC Dry Etcher G3.5
11 VACUUM CONDENSER (COMET) CVMI-1000AC/5-AAC-L YAC Dry Etcher G6
12 VACUUM CAPACITOR (MEIDEN) SCF-151.5Z MATCH BOX
13 CHILLER (RISSHI) CS-600 PSC STRIPPER